Open Source Maskless Lithography - Revision history

Eric: Added some more information

2023-08-30T04:18:18Z

Added some more information

← Older revision		Revision as of 04:18, 30 August 2023
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	**Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / [[Vacuum Workholding]] )		**Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / [[Vacuum Workholding]] )
	**Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image		**Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image
			*[https://www.youtube.com/watch?v=SB94rQtKlKI A Video by the YouTube Channel "Sam Zeloof" Titled "Making Tiny Things with Electron Microscope - E-beam Lithography" ] ( '''~9 Minute Watch''' )

	=Internal Links=		=Internal Links=

Eric: Added some more links under the "Internal Links" section

2023-08-30T04:17:25Z

Added some more links under the "Internal Links" section

← Older revision		Revision as of 04:17, 30 August 2023
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	=Internal Links=		=Internal Links=
	*		*[[MakerFoundry]] (A Similar Project)

	=External Links=		=External Links=
	*		*

Eric: Finished the page out

2023-08-30T04:14:47Z

Finished the page out

← Older revision		Revision as of 04:14, 30 August 2023
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	**~100nm Capable, may need to be a bit above that to be reliable ( [https://youtu.be/3KXkcFcjcfY?si=Q4WfSD9Mv6pM6d2H&t=802 Timecode to where they discuss this] )		**~100nm Capable, may need to be a bit above that to be reliable ( [https://youtu.be/3KXkcFcjcfY?si=Q4WfSD9Mv6pM6d2H&t=802 Timecode to where they discuss this] )
	**Also needs more tuning ''and a proper [[cleanroom]] / [[glovebox]] !''		**Also needs more tuning ''and a proper [[cleanroom]] / [[glovebox]] !''

			== [[Huygens Optics]] ==
			*[https://www.youtube.com/playlist?list=PLaLGh7vzNIRRuvbxZKHOUaeosIO4hpcsw The Project's Playlist] (~5 12 Minute Videos)
			*Resolution Unknown, Need to Dig and/or Ask Them
			**They did make some sort of functional [[Metasurface Lens]] called a [[Fresnel Zone Plate]] so that's something!
			**The diagnostic text etched above each lens also seemed quite clear, but need a number

			== [[Sam Zeloof]] ==
			*[https://youtu.be/XVoldtNpIzI?si=7oZ4YMHOIatVMUD- A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography with DLP Projector - 10um Feature Sizes" ] ( '''~23 Minute Watch''' )
			**This is the older video where a stepper wasn't even used, just a jig to hold the wafer in place and a fixed projector
			*[https://youtu.be/Nxz_ENnmgtI?si=AyFjox8roiso71wY A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography Stepper for Homemade Chips" ] ( '''~10 Minute Watch''' )
			**Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / [[Vacuum Workholding]] )
			**Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image

			=Internal Links=
			*

			=External Links=
			*

Eric: Added some more information

2023-08-30T03:42:25Z

Added some more information

← Older revision		Revision as of 03:42, 30 August 2023
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	*[https://www.youtube.com/watch?v=XJ9w7DjI_Bc A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ] ( '''~22 Minute Watch''' )		*[https://www.youtube.com/watch?v=XJ9w7DjI_Bc A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ] ( '''~22 Minute Watch''' )
	**'''Direct Write Laser Lithography'''		**'''Direct Write Laser Lithography'''
	**1-3 Micron Resolution		**1-3 Micron Resolution ( [https://youtu.be/XJ9w7DjI_Bc?si=ak-MEXSMqpQC3DJ0&t=973 Timecode to where they discuss this]
	**Mostly 3D Printed Parts + Aluminum Extrusion		**Mostly 3D Printed Parts + Aluminum Extrusion
	**4.5nm UV Diode Laser		**4.5nm UV Diode Laser

Eric: Saving My Progress Mid-Long Edit

2023-08-30T03:40:23Z

Saving My Progress Mid-Long Edit

New page

=Basics=
*This page goes over the various ways OSE (Or other interested groups) could go about Lithography, without the need to produce a seperate photomask for each project
*It is similar to [[Injection Mold Tooling]] vs 3D Printing
*There are a few ways this could be done at a Makerspace+ Level Scale
*Mainly:
**LCD (Double Check)
**DLP (Proven)
**Laser (Proven)
**''Potentially'' Electron Beam
*The Main Applications of this [[Microfabrication]] capability would be Semiconductors, [[MEMS]] , [[Microfluidics]] , and potentially [[Meta-Materials]] (Although the latter is far more niche) (Although given the [[Scale]] of it all it would moreso be for RnD and Edge Cases/Small Batch Production for Them)

=Existing Open Source Designs=
== [[Breaking Taps (YouTube Channel) ]] ==
*They have made two so far:
*[https://www.youtube.com/watch?v=XJ9w7DjI_Bc A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ] ( '''~22 Minute Watch''' )
**'''Direct Write Laser Lithography'''
**1-3 Micron Resolution
**Mostly 3D Printed Parts + Aluminum Extrusion
**4.5nm UV Diode Laser
**[[Optical Breadboard]] Based
**Microscope Optic at the end
**Low repeatability due to Low Rigidity, Creep, and Coefficient of Thermal Expansion
**Was moreso a proof of concept
*[https://youtu.be/3KXkcFcjcfY?si=l_Fo0rI5L66_JAyQ A Video by the YouTube Channel "Breaking Taps" Titled "Electron Beam Lithography: drawing images with electrons" ] ( '''~25 Minute Watch''' )
**Uses an OTS [[Electron Microscope]] and [[PMMA]] (Acrylic) Dissolved in [[Anisole]] (Also known as [[Methoxybenzene]] ) on a [[Silicon Wafer]] doped so it is electrically conductive
**~100nm Capable, may need to be a bit above that to be reliable ( [https://youtu.be/3KXkcFcjcfY?si=Q4WfSD9Mv6pM6d2H&t=802 Timecode to where they discuss this] )
**Also needs more tuning ''and a proper [[cleanroom]] / [[glovebox]] !''