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	<title>Open Source Stepper - Revision history</title>
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	<updated>2026-05-09T07:00:45Z</updated>
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		<id>https://wiki.opensourceecology.org/index.php?title=Open_Source_Stepper&amp;diff=208912&amp;oldid=prev</id>
		<title>Marcin: Created page with &quot;---------- Forwarded message ---------- From: Hagen SANKOWSKI &lt;hsank@posteo.de&gt; Date: Monday, January 13, 2020 Subject: [Libre-silicon-devel] Reminder - Next Mumble session on...&quot;</title>
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		<updated>2020-01-14T12:09:24Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;---------- Forwarded message ---------- From: Hagen SANKOWSKI &amp;lt;hsank@posteo.de&amp;gt; Date: Monday, January 13, 2020 Subject: [Libre-silicon-devel] Reminder - Next Mumble session on...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;---------- Forwarded message ----------&lt;br /&gt;
From: Hagen SANKOWSKI &amp;lt;hsank@posteo.de&amp;gt;&lt;br /&gt;
Date: Monday, January 13, 2020&lt;br /&gt;
Subject: [Libre-silicon-devel] Reminder - Next Mumble session on Sunday, 12/01/2020, 21.00 HKT&lt;br /&gt;
To: libresilicon-developers@list.libresilicon.com&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
Hello List.&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
Today, while talking about different possibilities to get back into a&lt;br /&gt;
clean room and to continue with our work there, we had once again an&lt;br /&gt;
other technical topic in our weekly Mumble session regarding the feature&lt;br /&gt;
size on the steppers [0],[1].&lt;br /&gt;
&lt;br /&gt;
All other machines are quite feasible in every clean room, but the&lt;br /&gt;
resolution of the stepper determinate the size feature size of our&lt;br /&gt;
technology node. Or, with smaller stepper resolutions we can manufacture&lt;br /&gt;
smaller structures with Photolithography [2],[3] on silicon. Short, this&lt;br /&gt;
machines limiting our possibilities, and, of course, they need masks [4]&lt;br /&gt;
which are quite expensive.&lt;br /&gt;
&lt;br /&gt;
Already a couple of weeks ago came up the idea of using quite common&lt;br /&gt;
display techniques instead of classical masks, which would allow to&lt;br /&gt;
manufacture / photolithography mask-less but faster than usual Laser&lt;br /&gt;
plotters are. Today Ference proposed to use the also quite common DPL&lt;br /&gt;
technique [6],[7] which is used in Off-the-Shelf Projectors.&lt;br /&gt;
&lt;br /&gt;
So we are now thinking about designing / building a Stepper from&lt;br /&gt;
scratch, or to replace the mask-holding parts / optics by something like&lt;br /&gt;
Laser + Diffusor + DLP.&lt;br /&gt;
&lt;br /&gt;
Of course, this machine building stuff should be also open source,&lt;br /&gt;
public and community-driven as well as our LibreSilicon process. In the&lt;br /&gt;
beginning there is no need for keeping this machine in a clean room&lt;br /&gt;
under controlled conditions. Just later, when it comes to production a&lt;br /&gt;
machines has to get clean.&lt;br /&gt;
&lt;br /&gt;
So are there physicist out there which like to deal with this topic of&lt;br /&gt;
constructing / hacking hacking such equipment?&lt;br /&gt;
&lt;br /&gt;
Please, if somebody of you on the list, or someone in your social&lt;br /&gt;
surroundings, is interesting in this topic, let us know it. We are happy&lt;br /&gt;
to seeing this kind of hacktivism also rising :-)&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
Best Regards,&lt;br /&gt;
Hagen.&lt;br /&gt;
&lt;br /&gt;
[0] https://en.wikipedia.org/wiki/Stepper&lt;br /&gt;
[1] https://de.wikipedia.org/wiki/Stepper_(Halbleitertechnik)&lt;br /&gt;
[2] https://en.wikipedia.org/wiki/Photolithography&lt;br /&gt;
[3] https://de.wikipedia.org/wiki/Fotolithografie_(Halbleitertechnik)&lt;br /&gt;
[4] https://en.wikipedia.org/wiki/Photomask&lt;br /&gt;
[5] https://de.wikipedia.org/wiki/Fotomaske&lt;br /&gt;
[6[ https://en.wikipedia.org/wiki/Digital_Light_Processing&lt;br /&gt;
[7] https://de.wikipedia.org/wiki/Digital_Light_Processing&lt;br /&gt;
&lt;br /&gt;
--&lt;br /&gt;
support LibreSilicon to get back into the Clean Room&lt;br /&gt;
https://www.gofundme.com/f/libresilicon-cleanroom-rent&lt;br /&gt;
_______________________________________________&lt;br /&gt;
Libresilicon-developers mailing list&lt;br /&gt;
Libresilicon-developers@list.libresilicon.com&lt;br /&gt;
https://list.libresilicon.com/mailman/listinfo/libresilicon-developers&lt;/div&gt;</summary>
		<author><name>Marcin</name></author>
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