Open Source Maskless Lithography: Difference between revisions
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*[https://www.youtube.com/watch?v=XJ9w7DjI_Bc A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ] ( '''~22 Minute Watch''' ) | *[https://www.youtube.com/watch?v=XJ9w7DjI_Bc A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ] ( '''~22 Minute Watch''' ) | ||
**'''Direct Write Laser Lithography''' | **'''Direct Write Laser Lithography''' | ||
**1-3 Micron Resolution | **1-3 Micron Resolution ( [https://youtu.be/XJ9w7DjI_Bc?si=ak-MEXSMqpQC3DJ0&t=973 Timecode to where they discuss this] | ||
**Mostly 3D Printed Parts + Aluminum Extrusion | **Mostly 3D Printed Parts + Aluminum Extrusion | ||
**4.5nm UV Diode Laser | **4.5nm UV Diode Laser | ||
| Line 26: | Line 26: | ||
**~100nm Capable, may need to be a bit above that to be reliable ( [https://youtu.be/3KXkcFcjcfY?si=Q4WfSD9Mv6pM6d2H&t=802 Timecode to where they discuss this] ) | **~100nm Capable, may need to be a bit above that to be reliable ( [https://youtu.be/3KXkcFcjcfY?si=Q4WfSD9Mv6pM6d2H&t=802 Timecode to where they discuss this] ) | ||
**Also needs more tuning ''and a proper [[cleanroom]] / [[glovebox]] !'' | **Also needs more tuning ''and a proper [[cleanroom]] / [[glovebox]] !'' | ||
== [[Huygens Optics]] == | |||
*[https://www.youtube.com/playlist?list=PLaLGh7vzNIRRuvbxZKHOUaeosIO4hpcsw The Project's Playlist] (~5 12 Minute Videos) | |||
*Resolution Unknown, Need to Dig and/or Ask Them | |||
**They did make some sort of functional [[Metasurface Lens]] called a [[Fresnel Zone Plate]] so that's something! | |||
**The diagnostic text etched above each lens also seemed quite clear, but need a number | |||
== [[Sam Zeloof]] == | |||
*[https://youtu.be/XVoldtNpIzI?si=7oZ4YMHOIatVMUD- A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography with DLP Projector - 10um Feature Sizes" ] ( '''~23 Minute Watch''' ) | |||
**This is the older video where a stepper wasn't even used, just a jig to hold the wafer in place and a fixed projector | |||
*[https://youtu.be/Nxz_ENnmgtI?si=AyFjox8roiso71wY A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography Stepper for Homemade Chips" ] ( '''~10 Minute Watch''' ) | |||
**Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / [[Vacuum Workholding]] ) | |||
**Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image | |||
*[https://www.youtube.com/watch?v=SB94rQtKlKI A Video by the YouTube Channel "Sam Zeloof" Titled "Making Tiny Things with Electron Microscope - E-beam Lithography" ] ( '''~9 Minute Watch''' ) | |||
=Internal Links= | |||
*[[MakerFoundry]] (A Similar Project) | |||
=External Links= | |||
* | |||
Latest revision as of 04:18, 30 August 2023
Basics
- This page goes over the various ways OSE (Or other interested groups) could go about Lithography, without the need to produce a seperate photomask for each project
- It is similar to Injection Mold Tooling vs 3D Printing
- There are a few ways this could be done at a Makerspace+ Level Scale
- Mainly:
- LCD (Double Check)
- DLP (Proven)
- Laser (Proven)
- Potentially Electron Beam
- The Main Applications of this Microfabrication capability would be Semiconductors, MEMS , Microfluidics , and potentially Meta-Materials (Although the latter is far more niche) (Although given the Scale of it all it would moreso be for RnD and Edge Cases/Small Batch Production for Them)
Existing Open Source Designs
Breaking Taps (YouTube Channel)
- They have made two so far:
- A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ( ~22 Minute Watch )
- Direct Write Laser Lithography
- 1-3 Micron Resolution ( Timecode to where they discuss this
- Mostly 3D Printed Parts + Aluminum Extrusion
- 4.5nm UV Diode Laser
- Optical Breadboard Based
- Microscope Optic at the end
- Low repeatability due to Low Rigidity, Creep, and Coefficient of Thermal Expansion
- Was moreso a proof of concept
- A Video by the YouTube Channel "Breaking Taps" Titled "Electron Beam Lithography: drawing images with electrons" ( ~25 Minute Watch )
- Uses an OTS Electron Microscope and PMMA (Acrylic) Dissolved in Anisole (Also known as Methoxybenzene ) on a Silicon Wafer doped so it is electrically conductive
- ~100nm Capable, may need to be a bit above that to be reliable ( Timecode to where they discuss this )
- Also needs more tuning and a proper cleanroom / glovebox !
Huygens Optics
- The Project's Playlist (~5 12 Minute Videos)
- Resolution Unknown, Need to Dig and/or Ask Them
- They did make some sort of functional Metasurface Lens called a Fresnel Zone Plate so that's something!
- The diagnostic text etched above each lens also seemed quite clear, but need a number
Sam Zeloof
- A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography with DLP Projector - 10um Feature Sizes" ( ~23 Minute Watch )
- This is the older video where a stepper wasn't even used, just a jig to hold the wafer in place and a fixed projector
- A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography Stepper for Homemade Chips" ( ~10 Minute Watch )
- Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / Vacuum Workholding )
- Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image
- A Video by the YouTube Channel "Sam Zeloof" Titled "Making Tiny Things with Electron Microscope - E-beam Lithography" ( ~9 Minute Watch )
Internal Links
- MakerFoundry (A Similar Project)