Revision as of 04:14, 30 August 2023

Basics

This page goes over the various ways OSE (Or other interested groups) could go about Lithography, without the need to produce a seperate photomask for each project
It is similar to Injection Mold Tooling vs 3D Printing
There are a few ways this could be done at a Makerspace+ Level Scale
Mainly:
- LCD (Double Check)
- DLP (Proven)
- Laser (Proven)
- Potentially Electron Beam
The Main Applications of this Microfabrication capability would be Semiconductors, MEMS , Microfluidics , and potentially Meta-Materials (Although the latter is far more niche) (Although given the Scale of it all it would moreso be for RnD and Edge Cases/Small Batch Production for Them)

They have made two so far:
A Video by the YouTube Channel "Breaking Taps" Titled "DIY Laser Lithography: Micron resolution" ( ~22 Minute Watch )
- Direct Write Laser Lithography
- 1-3 Micron Resolution ( Timecode to where they discuss this
- Mostly 3D Printed Parts + Aluminum Extrusion
- 4.5nm UV Diode Laser
- Optical Breadboard Based
- Microscope Optic at the end
- Low repeatability due to Low Rigidity, Creep, and Coefficient of Thermal Expansion
- Was moreso a proof of concept
A Video by the YouTube Channel "Breaking Taps" Titled "Electron Beam Lithography: drawing images with electrons" ( ~25 Minute Watch )
- Uses an OTS Electron Microscope and PMMA (Acrylic) Dissolved in Anisole (Also known as Methoxybenzene ) on a Silicon Wafer doped so it is electrically conductive
- ~100nm Capable, may need to be a bit above that to be reliable ( Timecode to where they discuss this )
- Also needs more tuning and a proper cleanroom / glovebox !

The Project's Playlist (~5 12 Minute Videos)
Resolution Unknown, Need to Dig and/or Ask Them
- They did make some sort of functional Metasurface Lens called a Fresnel Zone Plate so that's something!
- The diagnostic text etched above each lens also seemed quite clear, but need a number

A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography with DLP Projector - 10um Feature Sizes" ( ~23 Minute Watch )
- This is the older video where a stepper wasn't even used, just a jig to hold the wafer in place and a fixed projector
A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography Stepper for Homemade Chips" ( ~10 Minute Watch )
- Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / Vacuum Workholding )
- Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image

@@ Line 26: / Line 26: @@
 **~100nm Capable, may need to be a bit above that to be reliable ( [https://youtu.be/3KXkcFcjcfY?si=Q4WfSD9Mv6pM6d2H&t=802 Timecode to where they discuss this] )
 **Also needs more tuning ''and a proper [[cleanroom]] / [[glovebox]] !''
+== [[Huygens Optics]] ==
+*[https://www.youtube.com/playlist?list=PLaLGh7vzNIRRuvbxZKHOUaeosIO4hpcsw The Project's Playlist] (~5 12 Minute Videos)
+*Resolution Unknown, Need to Dig and/or Ask Them
+**They did make some sort of functional [[Metasurface Lens]] called a [[Fresnel Zone Plate]] so that's something!
+**The diagnostic text etched above each lens also seemed quite clear, but need a number
+== [[Sam Zeloof]] ==
+*[https://youtu.be/XVoldtNpIzI?si=7oZ4YMHOIatVMUD- A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography with DLP Projector - 10um Feature Sizes" ] ( '''~23 Minute Watch''' )
+**This is the older video where a stepper wasn't even used, just a jig to hold the wafer in place and a fixed projector
+*[https://youtu.be/Nxz_ENnmgtI?si=AyFjox8roiso71wY A Video by the YouTube Channel "Sam Zeloof" Titled "Maskless Photolithography Stepper for Homemade Chips" ] ( '''~10 Minute Watch''' )
+**Uses a projector fed into a microscope onto a xy stage (this may be a used proper device) with a vacuum chuck / [[Vacuum Workholding]] )
+**Also used a camera to calibrate for projectors with non-uniform brightness pre-sending the mask image
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