Open Source Plasma Cleaner
Contents
Basics
- A device that cleans off stuff using plasma (plus things listed below) in a low pressure gas enviroment (using a vacuum pump and a radio tranmitter)
- Uses a mixture plasma, light, and things like ozone, not just plasma, all are created by the same process (the ionization of the low pressure gas) and thus it is called a plasma cleaner
Used For
- Silicon Wafer Cleaning
- Cleanroom Stuff Cleaning (Glassware)
- Microscope slide cleaning
- Can be modified to be used as an etchant (with more power) in the Open Source Photolithography System
Industry Standards
Existing Open Source Designs
- [https://www.youtube.com/watch?v=atVSxvbiPg0 This one by the youtube channel "Applied Science"
Minimum Viable Product
- Low Cost
- Low Power Usage
- Modular
- Scalable in power (From a gentle cleaner to a plasma etcher)
- Scalable in size (From a tabletop device to a sattalite/space probe/planatary probe plasma cleaner
Basic Design
Vacuum Chamber
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RF Generator
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Coiled RF Antennae
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Gas Input
- Can add special atmospheres such as oxygen, hydrogen, or argon
- Can improve or otherwise modify cleaning profiles by doing so
BOM
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See Also
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Useful Links
- Wikipedia Page on Plasma Cleaning
- Applied Science Video on Plasma Cleaning, a definit must watch
