Open Source Stepper
Forwarded message ----------
From: Hagen SANKOWSKI <hsank@posteo.de> Date: Monday, January 13, 2020 Subject: [Libre-silicon-devel] Reminder - Next Mumble session on Sunday, 12/01/2020, 21.00 HKT To: libresilicon-developers@list.libresilicon.com
Hello List.
Today, while talking about different possibilities to get back into a
clean room and to continue with our work there, we had once again an
other technical topic in our weekly Mumble session regarding the feature
size on the steppers [0],[1].
All other machines are quite feasible in every clean room, but the resolution of the stepper determinate the size feature size of our technology node. Or, with smaller stepper resolutions we can manufacture smaller structures with Photolithography [2],[3] on silicon. Short, this machines limiting our possibilities, and, of course, they need masks [4] which are quite expensive.
Already a couple of weeks ago came up the idea of using quite common display techniques instead of classical masks, which would allow to manufacture / photolithography mask-less but faster than usual Laser plotters are. Today Ference proposed to use the also quite common DPL technique [6],[7] which is used in Off-the-Shelf Projectors.
So we are now thinking about designing / building a Stepper from scratch, or to replace the mask-holding parts / optics by something like Laser + Diffusor + DLP.
Of course, this machine building stuff should be also open source, public and community-driven as well as our LibreSilicon process. In the beginning there is no need for keeping this machine in a clean room under controlled conditions. Just later, when it comes to production a machines has to get clean.
So are there physicist out there which like to deal with this topic of constructing / hacking hacking such equipment?
Please, if somebody of you on the list, or someone in your social surroundings, is interesting in this topic, let us know it. We are happy to seeing this kind of hacktivism also rising :-)
Best Regards,
Hagen.
[0] https://en.wikipedia.org/wiki/Stepper [1] https://de.wikipedia.org/wiki/Stepper_(Halbleitertechnik) [2] https://en.wikipedia.org/wiki/Photolithography [3] https://de.wikipedia.org/wiki/Fotolithografie_(Halbleitertechnik) [4] https://en.wikipedia.org/wiki/Photomask [5] https://de.wikipedia.org/wiki/Fotomaske [6[ https://en.wikipedia.org/wiki/Digital_Light_Processing [7] https://de.wikipedia.org/wiki/Digital_Light_Processing
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